Applications

Our in-situ metrology systems are powerful tools in your hand: they provide you with real-time information on what is happening in your deposition system. Tight control of process conditions for every layer in every wafer enables you to optimize your growth processes and achieve the best device performance and uniformity. LayTec’s metrology solutions rely on a portfolio of sophisticated mostly optical methods for characterizing the samples which are being processed. However, depending on the particular device, process or material class the benefits of using these methods can differ from one application to the other, whilst in all cases process understanding, repeatability and production yield will benefit from applying those methods.

Devices

In many cases, highly specialized devices depend on unique parameters that require dedicated metrology approaches to effectively monitor and control these parameters during processing. Some prominent examples are discussed in this section.

VCSEL

Combined power of spectral sensing and industry proven EpiTT and EpiCurve® TT performance.

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UV LEDs

Extension of industry proven EpiTT and EpiCurve® TT performance to dedicated UV wavelengths.

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Power and RF electronics

In-situ power for RF and power electronics.

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Photovoltaics

LayTec offers metrology solutions particularly designed for critical processes in the production processes of photovoltaic (PV) modules. For crystalline photovoltaics, we focus on the quality control of the module encapsulation processes whereas for thin film PV, practically all frontend deposition processes can be controlled by applying either in-situ or in-line optical metrology methods. The latter can also be applied in the currently emerging field of tandem PV devices composed of either two thin film devices (e.g. CIGS and perovskites) or on a combination of silicon and perovskite solar cells.

Crystalline silicon PV modules (c-Si)

Quality control of PV module encapsulants and polymer foils.

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Perovskite, organic PV and hybrid materials

In-situ and in-line metrology for film formation process control of perovskites and other emerging materials.

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Compound semiconductor materials

Within the field of compound semiconductors several groups of materials represent different fields of applications due to the particular properties of the compounds of each group, which are defined by the atoms forming these compounds. Most prominently, arsenides, nitrides and phosphides need to be mentioned, whereas further applications rely on antimonides, tellurides or certain oxides.

III-Nitride based

Get control of your III-Nitride process from Epi to Etch.

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InP based

InP in-situ monitoring and mapping of InP films from Epi to Etch.

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GaAs based

Integrated process control for GaAs devices from Epi to Etch.

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SiC

Get the full functionality of your LayTec equipment – even at 1800°C.

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Your application

Whether you are working in research or high-volume manufacturing – if your process involves thin films, we are your partner for in-situ and in-line metrology. Our optical measurement systems help you monitor and control critical parameters in real time, ensuring optimal process stability and product quality. From compound semi­conductors to advanced coatings, if your application requires precise, non-invasive monitoring, we are here to support you with customized solutions tailored to your specific needs.

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