Applications
Our in-situ metrology systems are powerful tools in your hand: they provide you with real-time information on what is happening in your deposition system. Tight control of process conditions for every layer in every wafer enables you to optimize your growth processes and achieve the best device performance and uniformity. LayTec’s metrology solutions rely on a portfolio of sophisticated mostly optical methods for characterizing the samples which are being processed. However, depending on the particular device, process or material class the benefits of using these methods can differ from one application to the other, whilst in all cases process understanding, repeatability and production yield will benefit from applying those methods.
Devices
In many cases, highly specialized devices depend on unique parameters that require dedicated metrology approaches to effectively monitor and control these parameters during processing. Some prominent examples are discussed in this section.
Photovoltaics
LayTec offers metrology solutions particularly designed for critical processes in the production processes of photovoltaic (PV) modules. For crystalline photovoltaics, we focus on the quality control of the module encapsulation processes whereas for thin film PV, practically all frontend deposition processes can be controlled by applying either in-situ or in-line optical metrology methods. The latter can also be applied in the currently emerging field of tandem PV devices composed of either two thin film devices (e.g. CIGS and perovskites) or on a combination of silicon and perovskite solar cells.
Compound semiconductor materials
Within the field of compound semiconductors several groups of materials represent different fields of applications due to the particular properties of the compounds of each group, which are defined by the atoms forming these compounds. Most prominently, arsenides, nitrides and phosphides need to be mentioned, whereas further applications rely on antimonides, tellurides or certain oxides.
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