Spectroscopic R&T
Growth rate, thickness and morphology by in-situ monitoring of spectral reflectance
Reflectance and transmittance characterize the main optical properties of virtually all materials. Using reflectance, the ratio of light reflected from a sample and incident light can be determined. Transmittance method measures the ratio of transmitted and incident light. These methods are particularly useful, if information about the specific spectral position of a device, such as the emission wavelength of a VCSEL device or the absorption edge of a solar cell, are an important factor that needs to be controlled during growth.In contrast to 3λ-reflectance reflectance, spectral reflectance can also be applied between two processes as an in-line measurements or as an ex-situ stand-alone measurement.
Features
The methods can be applied for characterization of:
Optical layers, such as antireflective or highly reflective coatings, to determine the main purpose of the layer
Absorber materials in solar cells
Color impression of a material wherever esthetical aspects have to be considered (e.g. in architectural glass for building fronts). This can be done by analyzing the spectral distribution of transmitted and reflected light.
The spectrum of reflected and transmitted light bears information on deposited layers and layer stacks. Reflectance and transmittance occur not only on surfaces, but also at all interfaces in multilayer systems. This generates superpositions of electro-magnetic light waves and characteristic interference patterns in the spectrum.
LayTec has developed sophisticated optical models for obtaining information from measured reflectance and transmittance spectra about thickness, color and other properties of deposited layers. Our in-situ, in-line and ex-situ metrology tools perform fast and contactless monitoring of deposited layers and layer stacks in various fields of application. The LayTec software analyses measured spectra immediately and facilitates direct data exchange for in-situ and in-line process control.
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