InspiRe
LayTec’s spectral in-situ monitoring tool for various compound semiconductors such as perovskites and CIGS.
Perovskites and similar materials are manufactured by a variety of processes such as thermal evaporation in vacuum or spin coating. Typically, in the latter case, subsequent thermal annealing under inert gas atmosphere is also applied. Similarly, CIGS growth is a complex multi-step process based on co-evaporation or sputtering and selenization. InspiRe is well-suited for spectral monitoring like complex and rapid growth and phase formation processes due to its rapid acquisition rates in the millisecond range.
Monitoring of rapidly changing liquid solution films during spin coating or evaporation
Providing real-time reflectance information during perovskite annealing revealing phase or surface transformations including visualization of growth rates, surface roughness and absorption edges
Real time growth rate and film thickness measurements
Real-time visualization of absorption edge and reaction kinetics
Optimization of coating and annealing times for other complex and/or multi-component materials
Monitoring of co-evaporation or sputtering processes for CIGS or TCO materials in vacuum chambers
Spectral reflectance monitoring in the VIS or NIR range
Sampling times of down to 0.5 ms
Various monitoring modes can be selected: 2D spectrogram, transients of chosen wavelengths, spectral analysis at selected process times
Can be combined with spectral and / or time-resolved in-situ photoluminescence metrology systems PearL and t-PearL for room temperature processes.
Real-time growth-rate/thickness measurements by various algorithms
Fingerprint run-to-run analysis based on 2D spectrograms
Features
InspiRe is available for various wavelength ranges in the VIS and NIR depending on materials and process requirements.
Multi-head versions of InspiRe are available on request.
PearL and t-PearL photoluminescence metrology system can be combined with InspiRe for room-temperature processes. In these cases all metrology methods can usually be combined in one shared measurement head
For high-temperature (T>400°C), the InspiRe metrology system can be combined with EpiTT and or EpiCurve TT metrology systems and act as their spectral reflectance extension as in the EpiTT VCSEL system.
Contact
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