NEPtune
Multi-wavelength reflectometer especially designed for wet etching in BEOL processing.
NEPtune is a multi-wavelength reflectometer especially designed for wet etching in BEOL processing. NEPtune includes a real-time embedded controller, which makes it ideal for reliable 24/7 operation in control loops.
End point detection (EPD) of metal films (e.g. copper, titanium) for under bump metallization (UBM)
End point detection (EPD) of metal films (e.g. copper, titanium) for copper pillar integration processes
End point detection in stacks of metal films
Providing real-time reflectance information during etching at multiple positions on the wafer, to assess process uniformity
Enables shorter etching cycles and improved CoO
Generates SPC data and run history over time to optimize production stability
It can be interfaced to the wet etch tool’s computer using TCP/IP (other interfaces on request)
The system can be configured for different integration:
OEM-integrated metrology without PC
Stand-alone system with PC
NEPtune’s modular platform allows to connect up to 3 metrology heads to a single controller, thus providing multiple measurement positions on a wafer
Related products
Contact
We look forward to hearing from you and will try to answer your questions or respond to your message as best we can. Please use one of the following contact options.