Another EpiX^® C2C mapping station has just been picked up at LayTec and is now travelling to its final destination in Asia!

Many thanks to our colleagues for ensuring that the tool arrives safely at our customer!

The EpiX^® C2C tool is a cassette-to-cassette white light reflectance and photoluminescence mapping station for compound semi production epi-wafers, be it device structures based on GaN, GaAs, InP or any other compound semiconductor material.

With its unmatched low spectral noise, absolute accuracy and 2D measurement homogeneity, it renders precise analysis results that enable classification on the die-level.

Additionally, using wafer-specific EpiNet^® MOCVD epitaxy analysis results, even complex device stacks can be analyzed to obtain the 2D profiles of critical layer thicknesses and compositions. These results, in turn, are used to facilitate sub-nm precision endpointing with LayTec in-situ metrology for plasma etching.