ILMetro
Comprehensive control of industrial thin-film production processes by multiple non-contact measurements.
ILMetro stations combine up to five LayTec in-line metrology systems for a comprehensive control of industrial thin film production processes by non-contact measurements. Each station can be customized to specific requirements and hence usually comprises a different combination of metrology systems.
Thin-film solar cell production
Perovskite, CIGS, CdTe, OPV and a-Si-based production lines
Adaptable to every in-line process via customized optical heads and mounts
Several ILMetro metrology stations can be connected in a feed-forward configuration
Various metrology methds can be combined in one ILMetro station
Spatially resolved thickness measurements through multiple heads
Automated film thickness analysis (incl. algorithms for rough layers and LayTec dispersion database for all PV materials)
PV-line software integration via Profibus, Ethernet, TCP/IP or other protocols for automated operation
Features
ILMetro in-line metrology station
Depending on the configuration, ILMetro enables monitoring key parameters of thin-film manufacturing processes such as:
Individual layer thickness of complex layer stacks with nm-accuracy
Sheet resistance
Transmittance
Reflectance
Spectral photoluminescence
Time-resolved photoluminescence
Chemical composition
Surface roughness
Uniformity information across the production line is gained by providing multiple measurement heads. The combined evaluation of various metrology techniques enables improved process control.
ILMetro is designed for 24/7 operation in industrial environments. ILMetro allows full integration into all types of industrial production lines (including conveyors, roll-to-roll, clean room and process chambers) through customization of:
Mechanical and optical adaption
Communication protocols and interfaces
ILMetro is used for incoming inspection, process control, QA, pass / fail tests and binning in industries producing glass, displays, photovoltaics, printed electronics carbon fibre and other products.
ILMetro R2R
Combines reflectance, transmittance and Eddy-current measurements for determining properties such as reflectivity, transmission layer thickness and sheet resistance. Additionally, ILMetro R2R is controlling the winding motion enabling fully automated mapping measurements of entire rolls of foil on the km-scale.
Alternatively the system can also be integrated into further R2R configurations for measurements on the moving foil. For R&D or additional quality assurance purposes the system also comprises a separate compartment for hand-loaded small-scale samples. With this new product, LayTec successfully enters the market for automated inspection and mapping systems for R2R foil processing.
Contact
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