EpiNet® Software
Our software for control, analysis and optimization of epitaxial processes.
EpiNet® is LayTec’s proprietary software for control, analysis and optimization of epitaxial processes in production and development of LEDs, laser diodes, VCSEL, HEMT, HBT and other electronic and optoelectronic devices. The software extracts key figures about wafers’ behavior during growth. In run-to-run control and in statistical process control, these key figures are used to improve yield and process capacity. EpiNet® can be integrated into automated fab workflow providing any desired level of information from simple plain-text files to sophisticated live SECS/GEM integration.
In-situ process control with ex-situ accuracy even for very thin layers
Control of complex production processes on operator level
Fast in-spec/out-of-spec indication for stop or go decisions
High automation saves operator time, eliminates error sources and makes in-situ control easy without training
Engineer’s access level for sophisticated data analysis
High customization
User-friendly visualization of measured data
Active real-time GOLDEN RUN analysis
Toolbox of diagnostic algorithms for all relevant process steps
Flexible configuration for epi fab-wide SPC (statistical process control) and FDC (fault detection & classification)
Tight in-house control of your confidential recipes
Full linescan capability
Integration into growth system software is possible
User-defined wafer-zones uniformity analysis
Ever-growing set of analysis algorithms for in-depth analysis of your particular deposition process
Interactive and recipe-controlled analysis of growth rate, layer thickness and optical constants
Display of measurements as time-resolved data sets, line scans and color plots
Fab integration & advanced process control
PocketGuard for advanced process control
Quick check of all monitored wafers during the run at one glance
All wafers are color-coded by user-defined in-spec/out-of-spec criteria and visualized as they are positioned on the susceptor
In-spec/out-of-spec criteria can be set for all LayTec‘s analysis features
Wafer-to-Wafer view for post-run analysis
Time-resolved transients, color plots and line scans
For Operators: Use of pre-configured analysis recipes & automated start of in-situ measurements
Customized run type management via EpiNet®’s configuration panel: Visualization of susceptor geometry and wafer-specific settings for each pocket
Features
EpiNet® is LayTec’s standard metrology software for deposition monitoring using metrology tool of the EpiCurve TT family. It is shipped in its basic license version with every metrology system.
EpiNet® Premium
For access to LayTec’s advanced algorithms and further fab integration options advanced users can obtain a premium license to fully exploit EpiNet®’s capabilities for process analysis and control.
Customized and dedicated extensions
LayTec is continuously extending its software portfolio to provide even more extensive analysis capabilities. Currently, extensions for e.g. spectral analysis are available. Future extensions will provide access to further metrology systems and maintenance tools. Sign up for LayTec's Newsletter or follow us on LinkedIn to stay updated.